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Epitaxial Silicon Wafera i ʻole EPI Silicon Wafer, he wafer o ka papa aniani semiconducting i waiho ʻia ma luna o ka ʻili aniani i poni ʻia o kahi substrate silikona e ka ulu epitaxial.ʻO ka papa epitaxial paha ka mea like me ka substrate e ka ulu ʻana o ka epitaxial homogeneous, a i ʻole kahi papa exotic me ka maikaʻi i makemake nui ʻia e ka ulu ʻana o ka epitaxial heterogeneous, kahi e hoʻohana ai i ka ʻenehana ulu epitaxial e komo pū me ka deposition chemical vapor deposition CVD, wai epitaxy LPE, a me ka molecular beam. epitaxy MBE e hoʻokō i ka maikaʻi kiʻekiʻe o ka haʻahaʻa haʻahaʻa haʻahaʻa a me ka ʻili ʻili maikaʻi.Hoʻohana nui ʻia ʻo Silicon Epitaxial Wafers i ka hana ʻana i nā mea semiconductor holomua, nā mea semiconductor i hoʻohui ʻia i nā ICs, discrete a me nā mana mana, i hoʻohana ʻia no ka mea o ka diode a me ka transistor a i ʻole substrate no IC e like me ke ʻano bipolar, MOS a me nā mea BiCMOS.Eia kekahi, hoʻohana pinepine ʻia nā ʻāpana epitaxial a me nā kiʻiʻoniʻoni mānoanoa EPI silicon wafers i ka microelectronics, photonics a me nā noi photovoltaics.
Hāʻawi
Hiki ke hāʻawi ʻia nā Epitaxial Silicon Wafers a i ʻole EPI Silicon Wafer ma Western Minmetals (SC) Corporation i ka nui o 4, 5 a me 6 iniha (100mm, 125mm, 150mm anawaena), me ka orientation <100>, <111>, epilayer resistivity o <1ohm -cm a i ʻole 150ohm-cm, a me ka mānoanoa epilayer o <1um a i ʻole 150um, e hoʻokō i nā koi like ʻole i ka hoʻopau ʻana i ka ʻili o ka lāʻau i kālai ʻia a i ʻole LTO, i hoʻopaʻa ʻia i loko o ka cassette me ka pahu pahu ma waho, a i ʻole e like me ke ʻano kikoʻī i ka hopena kūpono. .
Hōʻike ʻenehana
Epitaxial Silicon Wafersa i ʻole EPI Silicon Wafer ma Western Minmetals (SC) Corporation hiki ke hāʻawi ʻia i ka nui o 4, 5 a me 6 ʻīniha (100mm, 125mm, 150mm anawaena), me ke kuhikuhi <100>, <111>, epilayer resistivity o <1ohm-cm a i ʻole a hiki i ka 150ohm-cm, a me ka mānoanoa epilayer o <1um a i ʻole 150um, e hoʻokō i nā koi like ʻole i ka hoʻopau ʻana o ka ili o ka lāʻau i kālai ʻia a i ʻole LTO, i hoʻopaʻa ʻia i ka cassette me ka pahu pahu ma waho, a i ʻole e like me ke ʻano kikoʻī i ka hopena kūpono.
hōʻailona | Si |
Helu ʻĀtoma | 14 |
Kaumaha ʻĀtoma | 28.09 |
Māhele Māhele | Metalloid |
Pūʻulu, Manawa, Block | 14, 3, P |
ʻO ka hana aniani | Daimana |
kalakala | ʻeleʻele hina |
Lae hehee | 1414°C, 1687.15 K |
Lae paila | 3265°C, 3538.15 K |
ʻO ka mānoanoa ma 300K | 2.329 g/cm3 |
Ke kū'ē kūʻokoʻa | 3.2E5 Ω-cm |
Helu CAS | 7440-21-3 |
Helu EC | 231-130-8 |
ʻAʻole. | Nā mea | Kūlana Kūlana | ||
1 | Na ano nui | |||
1-1 | Nui | 4" | 5" | 6" |
1-2 | Anawaena mm | 100±0.5 | 125±0.5 | 150±0.5 |
1-3 | Kūlana | <100>, <111> | <100>, <111> | <100>, <111> |
2 | Nā ʻano o ka Layer Epitaxial | |||
2-1 | ʻAno ulu | CVD | CVD | CVD |
2-2 | ʻAno Conductivity | P a i ʻole P+, N/ a i ʻole N+ | P a i ʻole P+, N/ a i ʻole N+ | P a i ʻole P+, N/ a i ʻole N+ |
2-3 | Mānoanoa μm | 2.5-120 | 2.5-120 | 2.5-120 |
2-4 | Kaulike mānoanoa | ≤3% | ≤3% | ≤3% |
2-5 | Kū'ē Ω-cm | 0.1-50 | 0.1-50 | 0.1-50 |
2-6 | Kūlike like ʻole | ≤3% | ≤5% | - |
2-7 | Wehewehe cm-2 | <10 | <10 | <10 |
2-8 | ʻAno ʻili | ʻAʻohe puʻupuʻu, haze a iʻi ʻalani i koe, etc. | ||
3 | Nā ʻano o ka substrate | |||
3-1 | ʻAno ulu | CZ | CZ | CZ |
3-2 | ʻAno Conductivity | P/N | P/N | P/N |
3-3 | Mānoanoa μm | 525-675 | 525-675 | 525-675 |
3-4 | Mānoanoa Kaulike max | 3% | 3% | 3% |
3-5 | Kū'ē Ω-cm | E like me ka makemake | E like me ka makemake | E like me ka makemake |
3-6 | Kūlike like ʻole | 5% | 5% | 5% |
3-7 | TTV μm max | 10 | 10 | 10 |
3-8 | Kūlou μm max | 30 | 30 | 30 |
3-9 | Warp μm max | 30 | 30 | 30 |
3-10 | EPD cm-2 ka nui | 100 | 100 | 100 |
3-11 | Hōʻike Edge | Poepoe | Poepoe | Poepoe |
3-12 | ʻAno ʻili | ʻAʻohe puʻupuʻu, haze a iʻi ʻalani i koe, etc. | ||
3-13 | Hoʻopau ʻaoʻao hope | Kāohi ʻia a i ʻole LTO (5000±500Å) | ||
4 | Hoʻopili | Ka pahu i loko, pahu pahu ma waho. |
ʻO nā Wafers Epitaxial SiliconHoʻohana nui ʻia i ka hana ʻana i nā mea semiconductor holomua, nā mea semiconductor i hoʻohui ʻia i nā ICs, discrete a me nā mana mana, i hoʻohana ʻia no ka element of diode a me transistor a i ʻole substrate no IC e like me ke ʻano bipolar, MOS a me nā mea BiCMOS.Eia kekahi, hoʻohana pinepine ʻia nā ʻāpana epitaxial a me nā kiʻiʻoniʻoni mānoanoa EPI silicon wafers i ka microelectronics, photonics a me nā noi photovoltaics.
Manaʻo Kūʻai
Epitaxial Silicon Wafer